RS-7-4 Wafer Probe Illuminator

The SpectralLED® Wafer Probe Illuminator is an all solid-state, drop-in replacement for field-deployed wafer-level CCD and CMOS sensor testers. This uniform light source system is fully turnkey, and can readily be adapted to test head manipulators and handler instrumentation.

 

  System Compatibility

→    Agilent

→    Teradyne

→    National Instruments

→    Yokogawa

→    Advantest

→    Cascade Microtech

 

 

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Unprecedented Resolution and Accuracy for Camera and Image Sensor Calibration

  • All Solid-State Solution Delivers Vastly Reduced Operating & Maintenance Costs
  • > 99% Uniformity Over 110mm Field of View
  • Designed for Rapid Start-up, Repeatable  Performance and Maximum Up-time
  • Wavelength Options From the UVA to the Near Infrared
  • Quickly Simulate any CIE Illuminant or Macbeth™ / X- RITE™ Color Patch
  • Built-in RMS Spectral Fitting for Simulation of User Imported Spectra
  • Constant Current Drivers & Built-in Optical Feedback Ensure Accurate & Flicker-free Output in Real  Time
  • ISO/IEC 17025 Accredited by NVLAP (NVLAP lab code 200823-0) for Calibration Accuracy

 

Please contact us with your custom & OEM requirements

  Optical Specifications

Spectral Range

380 nm to 1,000 nm  (Custom ranges available on request)

 

Spectral Output

32 discrete LED channels, 3 broadband LED Channels

Visible resolution ~ 15 nm, NIR resolution ~ 50 nm (typical channel spacing)

 

 

Spectral Peaks

395nm, 405nm, 420nm, 430nm, 450nm, 460nm, 475nm, 495nm, 505nm, 520nm, 525nm, 535nm, 570nm,  595nm, 610nm, 620nm, 630nm, 637nm, 660nm, 675nm, 685nm, 700nm, 715nm, 730nm, 750nm, 760nm,  780nm, 805nm, 850nm, 895nm, 940nm, 965nm

2,700K Warm White, 3,000K Warm White, 6,500K Cool White  (Custom configurations available)

Spectral Bandwidth

Typical: Visible 20nm FWHM, NIR 50nm FWHM

CCT Range

1,900K to 40,000K

Preset Spectra

CIE Illuminants A, B, C, D50, D55, D65, D75, E, F1-F12, MacbethTM / X-RiteTM Color Patches

Custom Preset Spectra

Configurable at time of order via API. Contact factory for details

  Accuracy Specifications

Illumination Stability

≥ 99.99% after 50 ms for radiance or after 2,000 ms for color

Illumination Accuracy

± 1% Absolute, NIST traceable

Spectral Accuracy

± 1 nm centroid wavelength

Color Accuracy

CIE 1931 x, y ± 0.003

Linearity

< 0.1 % RMS of full scale

Temperature Stability

Within ± 1° C via active TEC

Long-term Drift

Output ≤ 2%  Spectral ≤ 1 nm  (channel dependent)

  Electrical Specifications

Electrical Resolution

16 bit DAC for channel current drivers  24 bit ADC for internal radiance monitor feedback

Dynamic Range Adjustment

4-5 decades typical  (spectrum dependent)

LED Control

Pure DC constant current with floating differential sensing

  General Specifications

 

Software

Firmware includes full spectral calibration with spectral fitting, preset storage, real-time optical feedback,  radiometric and photometric units supported

Interface Connectors

USB 2.0 type B and DB-9

Interface Protocol

Simple ASCII commands with optional binary block transfer

 

Supported Operating Systems

USB drivers for Windows, OSX and Linux via FTDI virtual COM port  Legacy RS-232 serial port for integration (no OS required)

Input Voltage and Power

110 to 240 VAC at 50-60Hz, 600W maximum

Dimensions

Please contact factory for details

  Optional Upgrades

RS-7 Wavemon™

Multi-channel photodiode system provides amplitude feedback & real-time wavelength measurements

Specifications are subject to change without notice.

RS-7 WavemonTM   Multi-channel photodiode system with amplitude feedback and real-time wavelength measurement

The Wavelength Monitor System is a multi-channel photodiode system which provides amplitude feedback and real-time wavelength measurements. It consists of three photodiodes each with an independent transimpedance amplifier circuit. Proprietary optical filtering techniques allows for wavelength accuracy of +/-0.25nm and repeatability of +/-0.05nm. The Wavelength Monitor PCBA, photodiodes, and optical filter assembly is temperature stabilized using a Peltier cooler and thermistor in a PID feedback loop. This assembly is a discrete module which can be used with any RS-7 model.

PDF iconRS-7 Wavemon Option

 

Please contact us with your custom & OEM requirements